Self-repairing characteristics in the solid-state Al2O3 film capacitors

Self-repairing characteristics in the solid-state Al2O3 film capacitors

The effect of the top electrode material on electrical characteristics of Al2O3 thin film capacitors has been investigated. Compared to devices with Pt top electrodes, devices using Al as the top electrode material exhibit a significantly reduced leakage current and a much higher breakdown strength....

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Applied physics letters 2014-07, Vol.105 (3)
Hauptverfasser: Hu, Baofu, Yao, Manwen, Xiao, Ruihua, Chen, Jianwen, Yao, Xi
Format: Artikel
Sprache:eng
Schlagworte:
Aluminum oxide
Anodizing
Applied physics
Capacitors
Electrode materials
Electrodes
Leakage current
Maintenance
Oxidation
Thin films
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The effect of the top electrode material on electrical characteristics of Al2O3 thin film capacitors has been investigated. Compared to devices with Pt top electrodes, devices using Al as the top electrode material exhibit a significantly reduced leakage current and a much higher breakdown strength. These electrical characteristics are linked to the anodic oxidation reaction, which makes the capacitors have the capability of self-repairing the defects in a high electric field.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.4890673