Improved high temperature integration of Al2O3 on MoS2 by using a metal oxide buffer layer
We deposited a metal oxide buffer layer before atomic layer deposition (ALD) of Al2O3 onto exfoliated molybdenum disulfide (MoS2) in order to accomplish enhanced integration. We demonstrate that even at a high temperature, functionalization of MoS2 by means of a metal oxide buffer layer can effectiv...
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Veröffentlicht in: | Applied physics letters 2015-01, Vol.106 (2) |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | We deposited a metal oxide buffer layer before atomic layer deposition (ALD) of Al2O3 onto exfoliated molybdenum disulfide (MoS2) in order to accomplish enhanced integration. We demonstrate that even at a high temperature, functionalization of MoS2 by means of a metal oxide buffer layer can effectively provide nucleation sites for ALD precursors, enabling much better surface coverage of Al2O3. It is shown that using a metal oxide buffer layer not only allows high temperature ALD process, resulting in highly improved quality of Al2O3/MoS2 interface, but also leaves MoS2 intact. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.4905634 |