Application of optical emission spectroscopy for the SNS H− ion source plasma studies

Application of optical emission spectroscopy for the SNS H− ion source plasma studies

The SNS H− ion source is a dual-frequency RF-driven (13.56-MHz low power continuous RF superimposed by 2-MHz high power pulsed RF with ∼1.0 ms pulse length at 60 Hz), Cs-enhanced ion source. This paper discusses the applications of optical emission spectroscopy for the ion source plasma conditioning...

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Bibliographische Detailangaben
Hauptverfasser: Han, B X, Stockli, M P, Welton, R F, Murray, S N, Pennisi, T R, Santana, M
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Emission analysis
Emission spectroscopy
Ion sources
Optical emission spectroscopy
Plasma
Radio frequency
Spectrum analysis
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Beschreibung
Zusammenfassung:The SNS H− ion source is a dual-frequency RF-driven (13.56-MHz low power continuous RF superimposed by 2-MHz high power pulsed RF with ∼1.0 ms pulse length at 60 Hz), Cs-enhanced ion source. This paper discusses the applications of optical emission spectroscopy for the ion source plasma conditioning, cesiation, failure diagnostics, and studies of plasma build-up and outage issues.
ISSN:0094-243X
1551-7616
DOI:10.1063/1.4916430