Influence of low optical frequencies on actuation dynamics of microelectromechanical systems via Casimir forces
The role of the Casimir force on the analysis of microactuators is strongly influenced by the optical properties of interacting materials. Bifurcation and phase portrait analysis were used to compare the sensitivity of actuators when the optical properties at low optical frequencies were modeled usi...
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Veröffentlicht in: | Journal of applied physics 2015-04, Vol.117 (14) |
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Hauptverfasser: | , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | The role of the Casimir force on the analysis of microactuators is strongly influenced by the optical properties of interacting materials. Bifurcation and phase portrait analysis were used to compare the sensitivity of actuators when the optical properties at low optical frequencies were modeled using the Drude and Plasma models. Indeed, for metallic systems, which have strong Casimir attraction, the details of the modeling of the low optical frequency regime can be dramatic, leading to predictions of either stable motion or stiction instability. However, this difference is strongly minimized for weakly conductive systems as are the doped insulators making actuation modeling more certain to predict. |
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ISSN: | 0021-8979 1089-7550 |
DOI: | 10.1063/1.4917081 |