Self-organization in planar magnetron microdischarge plasmas
Evidence is presented of rotating azimuthal wave structures in a planar magnetron microdischarge operating at 150 mTorr in argon. Plasma emission captured using a high frame rate camera reveals waves of azimuthal modes m = 3–5 propagating in the −E→×B→ direction. The dominant stable mode structure d...
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Veröffentlicht in: | Applied physics letters 2015-06, Vol.106 (25) |
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Hauptverfasser: | , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | Evidence is presented of rotating azimuthal wave structures in a planar magnetron microdischarge operating at 150 mTorr in argon. Plasma emission captured using a high frame rate camera reveals waves of azimuthal modes m = 3–5 propagating in the −E→×B→ direction. The dominant stable mode structure depends on discharge voltage. The negative drift direction is attributed to a local field reversal arising from strong density gradients that drive excess ions towards the anode. The transition between modes is shown to be consistent with models of gradient drift-wave dispersion in the presence of such a field reversal when the fluid representation includes ambipolar diffusion along the direction parallel to the magnetic field. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.4922898 |