Wireless passive pressure sensor based on sapphire direct bonding for harsh environments

•A wireless passive high-temperature pressure sensor based on sapphire direct bonding technology is proposed.•A more compact sensor with a greater sensitivity and a large pressure range has been demonstrated.•The proposed sensor can be mass-produced, which can reduce manufacturing costs.•The manufac...

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Veröffentlicht in:Sensors and actuators. A. Physical. 2018-09, Vol.280, p.406-412
Hauptverfasser: Li, Wangwang, Liang, Ting, Liu, Wenyi, Jia, Pinggang, Chen, Yulei, Xiong, Jijun, Lei, Cheng, Hong, Yingping, Li, Yongwei
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Sprache:eng
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