Wireless passive pressure sensor based on sapphire direct bonding for harsh environments
•A wireless passive high-temperature pressure sensor based on sapphire direct bonding technology is proposed.•A more compact sensor with a greater sensitivity and a large pressure range has been demonstrated.•The proposed sensor can be mass-produced, which can reduce manufacturing costs.•The manufac...
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Veröffentlicht in: | Sensors and actuators. A. Physical. 2018-09, Vol.280, p.406-412 |
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Format: | Artikel |
Sprache: | eng |
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