Phase transformations in Zr-Y-O nanostructured coatings using high-temperature TEM investigation

Deposition of nanostructured coatings on the basis of Zr-Y-O/Si-Al-N was implemented by the pulse magnetron methods. The structure-phase state of the nanostructured coatings were investigated by TEM. The phase transformation which occurs in the layer on the basis of Zr-Y-O was observed by TEM with the high resolution in high temperature chamber of the microscope. It was established that there was phase transition of the tetragonal phase to the monoclinic phase, which can ensure stress relaxation and closure of the surface cracks.