Time of Flight Backscatter and Secondary Ion Spectrometry in a Helium Ion Microscope

Time of Flight Backscatter and Secondary Ion Spectrometry in a Helium Ion Microscope

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Veröffentlicht in:Microscopy and microanalysis 2018-08, Vol.24 (S1), p.802-803
Hauptverfasser: Klingner, Nico, Hlawacek, Gregor, Heller, Rene, von Borany, Johannes, Facsko, Stefan
Format: Artikel
Sprache:eng
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Analytical and Instrumentation Science Symposia
Backscattering
Helium
Helium ions
Spectrometry
The FIB-SEM Laboratory: Sample Preparation and Beyond
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container_title Microscopy and microanalysis
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creator Klingner, Nico
Hlawacek, Gregor
Heller, Rene
von Borany, Johannes
Facsko, Stefan
description
doi_str_mv 10.1017/S1431927618004506
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issn 1431-9276
1435-8115
language eng
recordid cdi_proquest_journals_2117239392
source Alma/SFX Local Collection
subjects Analytical and Instrumentation Science Symposia
Backscattering
Helium
Helium ions
Spectrometry
The FIB-SEM Laboratory: Sample Preparation and Beyond
title Time of Flight Backscatter and Secondary Ion Spectrometry in a Helium Ion Microscope
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