An efficient and reliable growth method for epitaxial complex oxide films by molecular beam epitaxy

Transition metal oxide heterostructures and interfaces host a variety of exciting quantum phases and can be grown with atomic-scale precision by utilising the intensity oscillations of in situ reflection high-energy electron diffraction. However, establishing a stable oscillation pattern in the grow...

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Veröffentlicht in:Applied physics letters 2017-07, Vol.111 (1)
Hauptverfasser: Zhang, T. W., Mao, Z. W., Gu, Z. B., Nie, Y. F., Pan, X. Q.
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Sprache:eng
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Zusammenfassung:Transition metal oxide heterostructures and interfaces host a variety of exciting quantum phases and can be grown with atomic-scale precision by utilising the intensity oscillations of in situ reflection high-energy electron diffraction. However, establishing a stable oscillation pattern in the growth calibration of complex oxide films is very challenging and time consuming. Here, we develop a substantially more efficient and reliable growth calibration method for complex oxide films using molecular beam epitaxy.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.4990663