Fabrication of buried microfluidic channels with observation windows using femtosecond laser photoablation and parylene-C coating

We developed an advanced method for fabricating microfluidic structures comprising channels and inputs/outputs buried within a silicon wafer based on single level lithography. We etched trenches into a silicon substrate, covered these trenches with parylene-C, and selectively opened their bottoms us...

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Veröffentlicht in:	Microfluidics and nanofluidics 2018-09, Vol.22 (9), p.1-7, Article 105
Hauptverfasser:	Gablech, Imrich, Somer, Jakub, Fohlerová, Zdenka, Svatoš, Vojtěch, Pekárek, Jan, Kurdík, Stanislav, Feng, Jianguo, Fecko, Peter, Podešva, Pavel, Hubálek, Jaromír, Neužil, Pavel
Format:	Artikel
Sprache:	eng
Schlagworte:	Ambient temperature Analytical Chemistry Biomedical Engineering and Bioengineering Buried structures Channels Electronic devices Engineering Engineering Fluid Dynamics Etching Fabrication Fluorescein Forming Laser ablation Lasers Metal oxide semiconductors Metals Methods MOS devices Nanotechnology and Microengineering Removal Semiconductor devices Semiconductors Short Communication Silicon Silicon substrates Silicon wafers Temperature Trenches Vapors Xenon
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