Strongly (001) Oriented Bimorph PZT Film on Metal Foils Grown by rf‐Sputtering for Wrist‐Worn Piezoelectric Energy Harvesters

For piezoelectric energy harvesters, a large volume of piezoelectric material with a high figure of merit is essential to obtain a higher power density. The work describes the growth of highly (001) oriented sputtered lead zirconate titanate (PZT) films (f ≈ 0.99) exceeding 4 µm in thickness on both...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Advanced functional materials 2018-09, Vol.28 (36), p.n/a
Hauptverfasser: Yeo, Hong Goo, Xue, Tiancheng, Roundy, Shad, Ma, Xiaokun, Rahn, Christopher, Trolier‐McKinstry, Susan
Format: Artikel
Sprache:eng
Schlagworte:
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page n/a
container_issue 36
container_start_page
container_title Advanced functional materials
container_volume 28
creator Yeo, Hong Goo
Xue, Tiancheng
Roundy, Shad
Ma, Xiaokun
Rahn, Christopher
Trolier‐McKinstry, Susan
description For piezoelectric energy harvesters, a large volume of piezoelectric material with a high figure of merit is essential to obtain a higher power density. The work describes the growth of highly (001) oriented sputtered lead zirconate titanate (PZT) films (f ≈ 0.99) exceeding 4 µm in thickness on both sides of an Ni foil to produce a bimorph structure. These films are incorporated in novel wrist‐worn energy harvesters (
doi_str_mv 10.1002/adfm.201801327
format Article
fullrecord <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_journals_2098769404</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>2098769404</sourcerecordid><originalsourceid>FETCH-LOGICAL-c3177-959a54c42749005c9660c905c73995c196d4e2360ea61cfaaa80c44a5111c69d3</originalsourceid><addsrcrecordid>eNqFkM1OwzAQhCMEEqVw5WyJCxxS7MRx4mMp_UFqRaUWFXGJjOMUV2lc1ilVOMEb8Iw8Ca6KypHTjkbz7a7G884JbhGMg2uR5ctWgEmCSRjEB16DMML8EAfJ4V6Tx2PvxNoFxiSOQ9rwPicVmHJe1OjSeVfoHrQqK5WhG700sHpB46cp6uliiUyJRqoSBeoZXVjUB7Mp0XONIP_--Jqs1lWlQJdzlBtAM9C2cvbMQInGWr0bVShZgZaoWyqY12gg4E1Zh9hT7ygXhVVnv7PpPfS6087AH9737zrtoS9D96vPIy4iKmkQU45xJDljWHIn4pDzSBLOMqqCkGElGJG5ECLBklIREUIk41nY9C52e1dgXtfudrowayjdyTTAPIkZp5i6VGuXkmCsBZWnK9BLAXVKcLqtOd3WnO5rdgDfARtdqPqfdNq-7Y3-2B97i4KF</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>2098769404</pqid></control><display><type>article</type><title>Strongly (001) Oriented Bimorph PZT Film on Metal Foils Grown by rf‐Sputtering for Wrist‐Worn Piezoelectric Energy Harvesters</title><source>Wiley Online Library All Journals</source><creator>Yeo, Hong Goo ; Xue, Tiancheng ; Roundy, Shad ; Ma, Xiaokun ; Rahn, Christopher ; Trolier‐McKinstry, Susan</creator><creatorcontrib>Yeo, Hong Goo ; Xue, Tiancheng ; Roundy, Shad ; Ma, Xiaokun ; Rahn, Christopher ; Trolier‐McKinstry, Susan</creatorcontrib><description>For piezoelectric energy harvesters, a large volume of piezoelectric material with a high figure of merit is essential to obtain a higher power density. The work describes the growth of highly (001) oriented sputtered lead zirconate titanate (PZT) films (f ≈ 0.99) exceeding 4 µm in thickness on both sides of an Ni foil to produce a bimorph structure. These films are incorporated in novel wrist‐worn energy harvesters (&lt;16 cm2) in which piezoelectric beams are plucked magnetically using an eccentric rotor with embedded magnets to implement frequency up‐conversion. The resulting devices successfully convert low‐frequency vibration sources (i.e., from walking, rotating the wrist, and jogging) to higher frequency vibrations of the PZT beams (100–200 Hz). Measured at resonance, six beams producing an output of 1.2 mW is achieved at 0.15 G acceleration. For magnetic plucking of a wrist‐worn nonresonant device, 40–50 µW is produced during mild activity. Thick piezoelectric bimorphs are used to create wrist‐worn harvesters. Beams are plucked magnetically using an eccentric rotor with embedded magnets to implement frequency up‐conversion from low‐frequency vibration sources (i.e., from walking, rotating the wrist, and jogging) to higher frequency vibrations of the lead zirconate titanate beams (100–200 Hz). The devices generate 40–50 µW power during mild activity.</description><identifier>ISSN: 1616-301X</identifier><identifier>EISSN: 1616-3028</identifier><identifier>DOI: 10.1002/adfm.201801327</identifier><language>eng</language><publisher>Hoboken: Wiley Subscription Services, Inc</publisher><subject>Energy harvesting ; Figure of merit ; flexible metal foils ; Harvesters ; Lead zirconate titanates ; Magnetic resonance ; Magnets ; Materials science ; Metal foils ; Piezoelectricity ; Plucking ; PZT thin films ; rf‐sputtering ; textures ; wearable piezoelectric energy harvesters ; Wrist</subject><ispartof>Advanced functional materials, 2018-09, Vol.28 (36), p.n/a</ispartof><rights>2018 WILEY‐VCH Verlag GmbH &amp; Co. KGaA, Weinheim</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c3177-959a54c42749005c9660c905c73995c196d4e2360ea61cfaaa80c44a5111c69d3</citedby><cites>FETCH-LOGICAL-c3177-959a54c42749005c9660c905c73995c196d4e2360ea61cfaaa80c44a5111c69d3</cites><orcidid>0000-0002-7267-9281</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://onlinelibrary.wiley.com/doi/pdf/10.1002%2Fadfm.201801327$$EPDF$$P50$$Gwiley$$H</linktopdf><linktohtml>$$Uhttps://onlinelibrary.wiley.com/doi/full/10.1002%2Fadfm.201801327$$EHTML$$P50$$Gwiley$$H</linktohtml><link.rule.ids>314,780,784,1416,27922,27923,45572,45573</link.rule.ids></links><search><creatorcontrib>Yeo, Hong Goo</creatorcontrib><creatorcontrib>Xue, Tiancheng</creatorcontrib><creatorcontrib>Roundy, Shad</creatorcontrib><creatorcontrib>Ma, Xiaokun</creatorcontrib><creatorcontrib>Rahn, Christopher</creatorcontrib><creatorcontrib>Trolier‐McKinstry, Susan</creatorcontrib><title>Strongly (001) Oriented Bimorph PZT Film on Metal Foils Grown by rf‐Sputtering for Wrist‐Worn Piezoelectric Energy Harvesters</title><title>Advanced functional materials</title><description>For piezoelectric energy harvesters, a large volume of piezoelectric material with a high figure of merit is essential to obtain a higher power density. The work describes the growth of highly (001) oriented sputtered lead zirconate titanate (PZT) films (f ≈ 0.99) exceeding 4 µm in thickness on both sides of an Ni foil to produce a bimorph structure. These films are incorporated in novel wrist‐worn energy harvesters (&lt;16 cm2) in which piezoelectric beams are plucked magnetically using an eccentric rotor with embedded magnets to implement frequency up‐conversion. The resulting devices successfully convert low‐frequency vibration sources (i.e., from walking, rotating the wrist, and jogging) to higher frequency vibrations of the PZT beams (100–200 Hz). Measured at resonance, six beams producing an output of 1.2 mW is achieved at 0.15 G acceleration. For magnetic plucking of a wrist‐worn nonresonant device, 40–50 µW is produced during mild activity. Thick piezoelectric bimorphs are used to create wrist‐worn harvesters. Beams are plucked magnetically using an eccentric rotor with embedded magnets to implement frequency up‐conversion from low‐frequency vibration sources (i.e., from walking, rotating the wrist, and jogging) to higher frequency vibrations of the lead zirconate titanate beams (100–200 Hz). The devices generate 40–50 µW power during mild activity.</description><subject>Energy harvesting</subject><subject>Figure of merit</subject><subject>flexible metal foils</subject><subject>Harvesters</subject><subject>Lead zirconate titanates</subject><subject>Magnetic resonance</subject><subject>Magnets</subject><subject>Materials science</subject><subject>Metal foils</subject><subject>Piezoelectricity</subject><subject>Plucking</subject><subject>PZT thin films</subject><subject>rf‐sputtering</subject><subject>textures</subject><subject>wearable piezoelectric energy harvesters</subject><subject>Wrist</subject><issn>1616-301X</issn><issn>1616-3028</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2018</creationdate><recordtype>article</recordtype><recordid>eNqFkM1OwzAQhCMEEqVw5WyJCxxS7MRx4mMp_UFqRaUWFXGJjOMUV2lc1ilVOMEb8Iw8Ca6KypHTjkbz7a7G884JbhGMg2uR5ctWgEmCSRjEB16DMML8EAfJ4V6Tx2PvxNoFxiSOQ9rwPicVmHJe1OjSeVfoHrQqK5WhG700sHpB46cp6uliiUyJRqoSBeoZXVjUB7Mp0XONIP_--Jqs1lWlQJdzlBtAM9C2cvbMQInGWr0bVShZgZaoWyqY12gg4E1Zh9hT7ygXhVVnv7PpPfS6087AH9737zrtoS9D96vPIy4iKmkQU45xJDljWHIn4pDzSBLOMqqCkGElGJG5ECLBklIREUIk41nY9C52e1dgXtfudrowayjdyTTAPIkZp5i6VGuXkmCsBZWnK9BLAXVKcLqtOd3WnO5rdgDfARtdqPqfdNq-7Y3-2B97i4KF</recordid><startdate>20180905</startdate><enddate>20180905</enddate><creator>Yeo, Hong Goo</creator><creator>Xue, Tiancheng</creator><creator>Roundy, Shad</creator><creator>Ma, Xiaokun</creator><creator>Rahn, Christopher</creator><creator>Trolier‐McKinstry, Susan</creator><general>Wiley Subscription Services, Inc</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7SR</scope><scope>7U5</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope><scope>L7M</scope><orcidid>https://orcid.org/0000-0002-7267-9281</orcidid></search><sort><creationdate>20180905</creationdate><title>Strongly (001) Oriented Bimorph PZT Film on Metal Foils Grown by rf‐Sputtering for Wrist‐Worn Piezoelectric Energy Harvesters</title><author>Yeo, Hong Goo ; Xue, Tiancheng ; Roundy, Shad ; Ma, Xiaokun ; Rahn, Christopher ; Trolier‐McKinstry, Susan</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c3177-959a54c42749005c9660c905c73995c196d4e2360ea61cfaaa80c44a5111c69d3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2018</creationdate><topic>Energy harvesting</topic><topic>Figure of merit</topic><topic>flexible metal foils</topic><topic>Harvesters</topic><topic>Lead zirconate titanates</topic><topic>Magnetic resonance</topic><topic>Magnets</topic><topic>Materials science</topic><topic>Metal foils</topic><topic>Piezoelectricity</topic><topic>Plucking</topic><topic>PZT thin films</topic><topic>rf‐sputtering</topic><topic>textures</topic><topic>wearable piezoelectric energy harvesters</topic><topic>Wrist</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Yeo, Hong Goo</creatorcontrib><creatorcontrib>Xue, Tiancheng</creatorcontrib><creatorcontrib>Roundy, Shad</creatorcontrib><creatorcontrib>Ma, Xiaokun</creatorcontrib><creatorcontrib>Rahn, Christopher</creatorcontrib><creatorcontrib>Trolier‐McKinstry, Susan</creatorcontrib><collection>CrossRef</collection><collection>Electronics &amp; Communications Abstracts</collection><collection>Engineered Materials Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Advanced functional materials</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Yeo, Hong Goo</au><au>Xue, Tiancheng</au><au>Roundy, Shad</au><au>Ma, Xiaokun</au><au>Rahn, Christopher</au><au>Trolier‐McKinstry, Susan</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Strongly (001) Oriented Bimorph PZT Film on Metal Foils Grown by rf‐Sputtering for Wrist‐Worn Piezoelectric Energy Harvesters</atitle><jtitle>Advanced functional materials</jtitle><date>2018-09-05</date><risdate>2018</risdate><volume>28</volume><issue>36</issue><epage>n/a</epage><issn>1616-301X</issn><eissn>1616-3028</eissn><abstract>For piezoelectric energy harvesters, a large volume of piezoelectric material with a high figure of merit is essential to obtain a higher power density. The work describes the growth of highly (001) oriented sputtered lead zirconate titanate (PZT) films (f ≈ 0.99) exceeding 4 µm in thickness on both sides of an Ni foil to produce a bimorph structure. These films are incorporated in novel wrist‐worn energy harvesters (&lt;16 cm2) in which piezoelectric beams are plucked magnetically using an eccentric rotor with embedded magnets to implement frequency up‐conversion. The resulting devices successfully convert low‐frequency vibration sources (i.e., from walking, rotating the wrist, and jogging) to higher frequency vibrations of the PZT beams (100–200 Hz). Measured at resonance, six beams producing an output of 1.2 mW is achieved at 0.15 G acceleration. For magnetic plucking of a wrist‐worn nonresonant device, 40–50 µW is produced during mild activity. Thick piezoelectric bimorphs are used to create wrist‐worn harvesters. Beams are plucked magnetically using an eccentric rotor with embedded magnets to implement frequency up‐conversion from low‐frequency vibration sources (i.e., from walking, rotating the wrist, and jogging) to higher frequency vibrations of the lead zirconate titanate beams (100–200 Hz). The devices generate 40–50 µW power during mild activity.</abstract><cop>Hoboken</cop><pub>Wiley Subscription Services, Inc</pub><doi>10.1002/adfm.201801327</doi><tpages>9</tpages><orcidid>https://orcid.org/0000-0002-7267-9281</orcidid></addata></record>
fulltext fulltext
identifier ISSN: 1616-301X
ispartof Advanced functional materials, 2018-09, Vol.28 (36), p.n/a
issn 1616-301X
1616-3028
language eng
recordid cdi_proquest_journals_2098769404
source Wiley Online Library All Journals
subjects Energy harvesting
Figure of merit
flexible metal foils
Harvesters
Lead zirconate titanates
Magnetic resonance
Magnets
Materials science
Metal foils
Piezoelectricity
Plucking
PZT thin films
rf‐sputtering
textures
wearable piezoelectric energy harvesters
Wrist
title Strongly (001) Oriented Bimorph PZT Film on Metal Foils Grown by rf‐Sputtering for Wrist‐Worn Piezoelectric Energy Harvesters
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-10T07%3A16%3A20IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Strongly%20(001)%20Oriented%20Bimorph%20PZT%20Film%20on%20Metal%20Foils%20Grown%20by%20rf%E2%80%90Sputtering%20for%20Wrist%E2%80%90Worn%20Piezoelectric%20Energy%20Harvesters&rft.jtitle=Advanced%20functional%20materials&rft.au=Yeo,%20Hong%20Goo&rft.date=2018-09-05&rft.volume=28&rft.issue=36&rft.epage=n/a&rft.issn=1616-301X&rft.eissn=1616-3028&rft_id=info:doi/10.1002/adfm.201801327&rft_dat=%3Cproquest_cross%3E2098769404%3C/proquest_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=2098769404&rft_id=info:pmid/&rfr_iscdi=true