Strongly (001) Oriented Bimorph PZT Film on Metal Foils Grown by rf‐Sputtering for Wrist‐Worn Piezoelectric Energy Harvesters

Strongly (001) Oriented Bimorph PZT Film on Metal Foils Grown by rf‐Sputtering for Wrist‐Worn Piezoelectric Energy Harvesters

For piezoelectric energy harvesters, a large volume of piezoelectric material with a high figure of merit is essential to obtain a higher power density. The work describes the growth of highly (001) oriented sputtered lead zirconate titanate (PZT) films (f ≈ 0.99) exceeding 4 µm in thickness on both...

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Veröffentlicht in:Advanced functional materials 2018-09, Vol.28 (36), p.n/a
Hauptverfasser: Yeo, Hong Goo, Xue, Tiancheng, Roundy, Shad, Ma, Xiaokun, Rahn, Christopher, Trolier‐McKinstry, Susan
Format: Artikel
Sprache:eng
Schlagworte:
Energy harvesting
Figure of merit
flexible metal foils
Harvesters
Lead zirconate titanates
Magnetic resonance
Magnets
Materials science
Metal foils
Piezoelectricity
Plucking
PZT thin films
rf‐sputtering
textures
wearable piezoelectric energy harvesters
Wrist
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Zusammenfassung:For piezoelectric energy harvesters, a large volume of piezoelectric material with a high figure of merit is essential to obtain a higher power density. The work describes the growth of highly (001) oriented sputtered lead zirconate titanate (PZT) films (f ≈ 0.99) exceeding 4 µm in thickness on both sides of an Ni foil to produce a bimorph structure. These films are incorporated in novel wrist‐worn energy harvesters (
ISSN:1616-301X
1616-3028
DOI:10.1002/adfm.201801327