Theory and experiments of liquid phase epitaxial growth Part 1

Characterization of the liquid phase epitaxial growth is in the scope of the present paper. The determination of the main parameters of the process such as the stationary growth rate, the time constant, the stationary supercooling, the kinetic coefficient, the initial growth rate, the crystallization mechanism are under consideration. Pursuing this aim a differential equation has been obtained which allows obtaining the dependences of the supersaturation, the growth rate and the growth layer thickness on the duration of growth. These dependences allow the determination of the above mentioned process parameters. Two mechanisms of crystallization are considered - the normal growth and the growth assisted by the screw dislocations. The two dimensional nuclei growth has not been considered because an analytical solution of the equation was not possible. Some of the theoretical contentions are confirmed by the experiments. Using the obtained values of the parameters dependences are defined. Good agreement between theory and experimental results is observed.