A new cantilever beam-rigid-body MEMS gyroscope: mathematical model and linear dynamics

A new cantilever beam-rigid-body MEMS gyroscope: mathematical model and linear dynamics

A new microbeam-rigid-body gyroscope is introduced and its static and dynamic behaviours are studied. The main structure includes a microbeam and an eccentric end-rigid-body influencing the dynamic and static characteristics of the sensor. The sensitivity of the device and the effect of system param...

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Veröffentlicht in:arXiv.org 2014-08
Hauptverfasser: Seyed Amir Mousavi Lajimi, Heppler, Glenn, Abdel-Rahman, Eihab
Format: Artikel
Sprache:eng
Schlagworte:
Cantilever beams
Microbeams
Parameter sensitivity
Static characteristics
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Zusammenfassung:A new microbeam-rigid-body gyroscope is introduced and its static and dynamic behaviours are studied. The main structure includes a microbeam and an eccentric end-rigid-body influencing the dynamic and static characteristics of the sensor. The sensitivity of the device and the effect of system parameters on the microsystem's response are investigated.
ISSN:2331-8422