Study of Thermoelastic Damping in Capacitive Micro-beam Resonators Using Hyperbolic Heat Conduction Model

In the present study, equations of coupled thermoelastic case have been derived using non-Fourier thermal conduction model for a capacitive micro-beam resonator. The Heat conduction is considered to exist in both longitudinal and cross sectional directions. The Quality factor of TED (Q^sub TED^) for two different cases, including two dimensional parabolic (TDP), and one dimensional hyperbolic (ODH) heat conduction models have been studied. The results are compared to those of applying one dimensional parabolic (ODP) heat conduction model. As the results illustrate Q^sub TED^ of TDP and ODH models are strongly in agreement with those of ODP model. Size-dependency of Q^sub TED^ has been investigated using two dimensional hyperbolic heat conduction model (TDH). According to the results, the values of critical thicknesses achieved of our calculations have a good agreement with the analytical values. By applying TDH model, the effect DC voltage on Q^sub TED^ for an electrostatically deflected micro-beam has been investigated. The results show that the bias DC voltage decreases the Q^sub TED^, and its influence is more considerable in the vicinity of pull-in position. Air damping (AD) and TED has been compared together for various dimensions. The results present that the comparison of quality factor related to AD (Q^sub AD^) and Q^sub TED^ is [PUBLICATION ABSTRACT]