A simple efficient method of nanofilm-on-bulk-substrate thermal conductivity measurement using Raman thermometry

•First Raman thermometric measurement of thermal conductivity of films on bulk substrate.•A simple efficient method: a dozen of films on quartz can be examined in one hour.•The method works for any film with thickness h > Λ (phonon-mean-free path).•For h Λ, where Λ is phonon-mean-free path, even for low-k films like nano-crystalline Si and SiGe. For h