Structural and Magnetic Characteristics of Nanogranular Co–Al2O3 Single- and Multilayer Films Formed by the Solid-State Synthesis
The results of structural and magnetic investigations of nanogranular Co–Al 2 O 3 films formed from Co 3 O 4 /Al thin-film layered structures upon vacuum annealing are reported. The Co 3 O 4 /Al films have been obtained by sequential reactive magnetron sputtering of a metallic cobalt target in a med...
Gespeichert in:
Veröffentlicht in: | Physics of the solid state 2018-07, Vol.60 (7), p.1425-1431 |
---|---|
Hauptverfasser: | , , , , , , , , , , , , |
Format: | Artikel |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | The results of structural and magnetic investigations of nanogranular Co–Al
2
O
3
films formed from Co
3
O
4
/Al thin-film layered structures upon vacuum annealing are reported. The Co
3
O
4
/Al films have been obtained by sequential reactive magnetron sputtering of a metallic cobalt target in a medium consisting of the Ar + O
2
gas mixture and magnetron sputtering of an aluminum target in the pure argon atmosphere. It is shown that such a technique makes it possible to obtain nanogranular Co–Al
2
O
3
single- and multilayer thin films with a well-controlled size of magnetic grains and their distribution over the film thickness. |
---|---|
ISSN: | 1063-7834 1090-6460 |
DOI: | 10.1134/S1063783418070302 |