Review in manufacturing methods of nanochannels of bio-nanofluidic chips

This review reports the progress on the recent development of manufacturing methods of nanochannels of bio-nanofluidic chips. Various manufacturing methods including reactive ion etching, high energy beam processing method, interference lithography, nanoimprinting, thin film deposition processing technology, hot embossing, stress release processing technology, molecular self-assembly processing technology, PDMS deformation processing and biofabrication of nanochannels are illustrated and discussed. The advantages and disadvantages of each manufacturing methods are expatiated. A variety of bio-nanofluidic chips fabricated with different manufacturing methods are also expounded and analyzed. This paper will provide a particularly convenient and valuable reference to those who intend to research the fabrication of bio-nanofluidic chips.