Modification of hydrophobicity properties of diamond like carbon films using glancing angle deposition method

•DLC films were manufactured using direct ion beam method by methane gas.•Effect GLAD method on hydrophobicity property of films was systematically studied.•Contact angle increment from 83.6° to 119.4° was detected.•Porosity and surface roughness effects on hydrophobicity nature were studied. We report the effect of glancing angle deposition (GLAD) method on hydrophobicity properties of diamond like carbon (DLC) films. DLC films were manufactured using direct ion beam method by methane (CH4) precursor gas at different incident flux angles (α = 0°, 45°, 75°, and 85°). We indicated increment in water contact angle from 83.6° to 119.4° with increasing the deposition angle and porosity of films. The top and cross sectional field emission scanning electron microscope (FESEM) images of films indicated noticeable changes in structure and morphology of the prepared specimens as functions of incident angles.