Deposition of polycrystalline AIN thin films by coherent magnetron sputtering at temperatures <80°C
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| Veröffentlicht in: | Journal of electronic materials 2001-01, Vol.30 (1), p.1-7 |
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| container_title | Journal of electronic materials |
| container_volume | 30 |
| creator | Chu, A. K. Chao, C. H. Lee, F. Z. Huang, H. L. |
| description | |
| doi_str_mv | 10.1007/s11664-001-0206-9 |
| format | Article |
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| language | eng |
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| source | SpringerLink Journals |
| title | Deposition of polycrystalline AIN thin films by coherent magnetron sputtering at temperatures <80°C |
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