Water bonding of 75 mm diameter GaP to AlGaInP-GaP light-emitting diode wafers

Water bonding of 75 mm diameter GaP to AlGaInP-GaP light-emitting diode wafers

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Veröffentlicht in:Journal of electronic materials 2000-02, Vol.29 (2), p.188
Hauptverfasser: I -H Tan, Vanderwater, D A, J -W Huang, Hofler, G E
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Vanderwater, D A
J -W Huang
Hofler, G E
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title Water bonding of 75 mm diameter GaP to AlGaInP-GaP light-emitting diode wafers
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