Rapid thermal annealing of zirconia films deposited by spray pyrolysis

Rapid thermal annealing of zirconia films deposited by spray pyrolysis

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Veröffentlicht in:Journal of electronic materials 1998-02, Vol.27 (2), p.96
Hauptverfasser: Beltran, N H, Balocchi, C, Errazu, X, Avila, R E, Piderit, G
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container_issue 2
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container_title Journal of electronic materials
container_volume 27
creator Beltran, N H
Balocchi, C
Errazu, X
Avila, R E
Piderit, G
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source Springer Nature - Complete Springer Journals
title Rapid thermal annealing of zirconia films deposited by spray pyrolysis
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