76‐4: Late-News Paper: Flat Panel Fingerprint/Touch‐input Image Sensor Using a‐Si TFT Photo‐transistor and Four‐Mask Process Architecture Technology

An Optical type fingerprint scanning/touch‐input flat panel is designed. The driving system is based on the passive pixel sensor (PPS) array with amorphous silicon (a‐Si) TFT technology. The embedded sensing structure of the optical sensor is using the a Si TFT phototransistor and four‐mask process...

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Veröffentlicht in:	SID International Symposium Digest of technical papers 2018-05, Vol.49 (1), p.1024-1027
Hauptverfasser:	Cho, An-Thung, Liu, Zhen, Liu, Kai-jun, Yang, Feng-yun, Mo, Qiong-hua, Hsu, James, Chen, Wade, Lu, York
Format:	Artikel
Sprache:	eng
Schlagworte:	a-Si TFT phototransistor Amorphous silicon Architecture Embedded structures Fingerprint/Optical-input sensor Fingerprints four-mask technology image sensor Optical measuring instruments Pixels Sensor arrays Sensors Touch
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Beschreibung
Zusammenfassung:	An Optical type fingerprint scanning/touch‐input flat panel is designed. The driving system is based on the passive pixel sensor (PPS) array with amorphous silicon (a‐Si) TFT technology. The embedded sensing structure of the optical sensor is using the a Si TFT phototransistor and four‐mask process architecture technology. The pixel density is over 500 PPI and the a‐Si TFT phototransistor sensor is high reliability by using Multi‐N+ layer in the a‐Si TFT structure.
ISSN:	0097-966X 2168-0159
DOI:	10.1002/sdtp.12195