75‐2: Novel Plane Source FMM Evaporation Techniques for Manufacturing of 2250ppi flexible AMOLEDs

The linear source FMM evaporation can only provide 600ppi AMOLED devices because of the shadow effect so that new concept of FMM patterning technology is needed in order to fabricate the 2250ppi AMOLEDs. Recently, the plane source FMM evaporation techniques has been developed to show a dramatically suppressed shadow effect and to measure the 0.18um of shadow distance and Hwang's mixing for the new way of EML layer process. The green color OLED device has been fabricated by the plane source evaporation to study the emission property for the first time. In addition, the fabrication process of the plane source FMM evaporator has been discussed for the 2250ppi flexible AMOLED.