Finite Element Simulation of Frequency Response of MEMS-Microphone

Finite Element Simulation of Frequency Response of MEMS-Microphone

The frequency response of a MEMS microphone is largely dependent on the design and size of the package. The location and size of the acoustic port, the dimensions of the front and back chamber, and the packaging material are of key importance. In this paper we present the results of calculating the...

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Veröffentlicht in:Russian microelectronics 2018-05, Vol.47 (3), p.211-216
Hauptverfasser: Grigor’ev, D. M., Godovitsyn, I. V., Amelichev, V. V., Generalov, S. S.
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Sprache:eng
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Computer simulation
Electrical Engineering
Engineering
Finite element method
Frequencies
Frequency response
Mathematical analysis
Mathematical models
Packaging
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container_end_page 216
container_issue 3
container_start_page 211
container_title Russian microelectronics
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creator Grigor’ev, D. M.
Godovitsyn, I. V.
Amelichev, V. V.
Generalov, S. S.
description The frequency response of a MEMS microphone is largely dependent on the design and size of the package. The location and size of the acoustic port, the dimensions of the front and back chamber, and the packaging material are of key importance. In this paper we present the results of calculating the frequency response of a MEMS microphone obtained by finite element modeling (FEM) for two main types of packaging with different positions of the acoustic port. The simulation results are analyzed and compared to the measured frequency response of the MEMS microphone.
doi_str_mv 10.1134/S106373971803006X
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subjects Computer simulation
Electrical Engineering
Engineering
Finite element method
Frequencies
Frequency response
Mathematical analysis
Mathematical models
Packaging
title Finite Element Simulation of Frequency Response of MEMS-Microphone
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