Finite Element Simulation of Frequency Response of MEMS-Microphone

Finite Element Simulation of Frequency Response of MEMS-Microphone

The frequency response of a MEMS microphone is largely dependent on the design and size of the package. The location and size of the acoustic port, the dimensions of the front and back chamber, and the packaging material are of key importance. In this paper we present the results of calculating the...

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Veröffentlicht in:Russian microelectronics 2018-05, Vol.47 (3), p.211-216
Hauptverfasser: Grigor’ev, D. M., Godovitsyn, I. V., Amelichev, V. V., Generalov, S. S.
Format: Artikel
Sprache:eng
Schlagworte:
Computer simulation
Electrical Engineering
Engineering
Finite element method
Frequencies
Frequency response
Mathematical analysis
Mathematical models
Packaging
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Zusammenfassung:The frequency response of a MEMS microphone is largely dependent on the design and size of the package. The location and size of the acoustic port, the dimensions of the front and back chamber, and the packaging material are of key importance. In this paper we present the results of calculating the frequency response of a MEMS microphone obtained by finite element modeling (FEM) for two main types of packaging with different positions of the acoustic port. The simulation results are analyzed and compared to the measured frequency response of the MEMS microphone.
ISSN:1063-7397
1608-3415
DOI:10.1134/S106373971803006X