Microfocus X-Ray Tubes with a Silicon Autoemission Nanocathode as an X-Ray Source

To develop nanostructures with extremely low spatial resolution (to 10 nm and below), a new concept of the use of arrays of microfocus X-ray tubes based on field emission silicon nanocathodes is proposed. A new λ-tunable microfocus source of X-ray radiation, based on a thinfilm transmission target w...

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Veröffentlicht in:	Bulletin of the Lebedev Physics Institute 2018, Vol.45 (1), p.1-5
Hauptverfasser:	Dyuzhev, N. A., Demin, G. D., Gryazneva, T. A., Pestov, A. E., Salashchenko, N. N., Chkhalo, N. I., Pudonin, F. A.
Format:	Artikel
Sprache:	eng
Schlagworte:	Field emission Physics Physics and Astronomy Silicon Spatial resolution X ray sources X ray tubes X-rays
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container_title	Bulletin of the Lebedev Physics Institute
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creator	Dyuzhev, N. A. Demin, G. D. Gryazneva, T. A. Pestov, A. E. Salashchenko, N. N. Chkhalo, N. I. Pudonin, F. A.
description	To develop nanostructures with extremely low spatial resolution (to 10 nm and below), a new concept of the use of arrays of microfocus X-ray tubes based on field emission silicon nanocathodes is proposed. A new λ-tunable microfocus source of X-ray radiation, based on a thinfilm transmission target with field emission nanocathode with tunable wavelength, is proposed. The possibility of decreasing the exposed area size to 20 nm and smaller by varying the tube blocking voltage is shown. The use of these X-ray sources opens a new way of developing maskless X-ray lithography.
doi_str_mv	10.3103/S1068335618010013
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subjects	Field emission Physics Physics and Astronomy Silicon Spatial resolution X ray sources X ray tubes X-rays
title	Microfocus X-Ray Tubes with a Silicon Autoemission Nanocathode as an X-Ray Source
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