Microfocus X-Ray Tubes with a Silicon Autoemission Nanocathode as an X-Ray Source

To develop nanostructures with extremely low spatial resolution (to 10 nm and below), a new concept of the use of arrays of microfocus X-ray tubes based on field emission silicon nanocathodes is proposed. A new λ-tunable microfocus source of X-ray radiation, based on a thinfilm transmission target with field emission nanocathode with tunable wavelength, is proposed. The possibility of decreasing the exposed area size to 20 nm and smaller by varying the tube blocking voltage is shown. The use of these X-ray sources opens a new way of developing maskless X-ray lithography.