Development of the Technology of Magnetron Sputtering Deposition of LiPON Films and Investigation of Their Characteristics

Development of the Technology of Magnetron Sputtering Deposition of LiPON Films and Investigation of Their Characteristics

The results of developing the technology of magnetron sputtering deposition of a LiPON solid electrolyte and an experimental investigation of its characteristics are presented. The basic processing operations and parameters providing the formation of films of the proper morphology, structure, and el...

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Veröffentlicht in:Russian microelectronics 2017-11, Vol.46 (6), p.424-432
Hauptverfasser: Vasilev, S. V., Lebedev, M. E., Mazaletskii, L. A., Metlitskaya, A. V., Mironenko, A. A., Naumov, V. V., Novozhilova, A. V., Rudyi, A. S., Fedorov, I. S.
Format: Artikel
Sprache:eng
Schlagworte:
Deposition
Electrical Engineering
Electrical measurement
Engineering
Magnetron sputtering
Phase composition
Physical properties
Potentiometric analysis
Solid electrolytes
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Beschreibung
Zusammenfassung:The results of developing the technology of magnetron sputtering deposition of a LiPON solid electrolyte and an experimental investigation of its characteristics are presented. The basic processing operations and parameters providing the formation of films of the proper morphology, structure, and elemental and phase composition are described. The data of the measurement of the physical parameters of the films by cyclic voltammetry and potentiometry are represented.
ISSN:1063-7397
1608-3415
DOI:10.1134/S1063739717060099