Microstructuring of carbon/tin quantum dots via a novel photolithography and pyrolysis-reduction process

A novel microfabrication process based on optimized photolithography combined with pyrolysis-reduction is proposed to fabricate interdigital porous carbon/tin quantum dots (C/Sn QDs) microelectrodes.C/Sn QDs active microelectrodes are also employed as current collectors of a micro-supercapacitor (MS...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Nano research 2017-11, Vol.10 (11), p.3743-3753
Hauptverfasser: Hong, Xufeng, He, Liang, Ma, Xinyu, Yang, Wei, Chen, Yiming, Zhang, Lei, Yan, Haowu, Li, Zhaohuai, Mai, Liqiang
Format: Artikel
Sprache:eng
Schlagworte:
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page 3753
container_issue 11
container_start_page 3743
container_title Nano research
container_volume 10
creator Hong, Xufeng
He, Liang
Ma, Xinyu
Yang, Wei
Chen, Yiming
Zhang, Lei
Yan, Haowu
Li, Zhaohuai
Mai, Liqiang
description A novel microfabrication process based on optimized photolithography combined with pyrolysis-reduction is proposed to fabricate interdigital porous carbon/tin quantum dots (C/Sn QDs) microelectrodes.C/Sn QDs active microelectrodes are also employed as current collectors of a micro-supercapacitor (MSC).A uniform dispersion of Sn QDs (diameter of ~3 nm) in the carbon matrix is achieved using our facile and controllable microfabrication process.The as-fabricated C/Sn QDs MSC obtained by carbonization at 900 ℃ exhibits a higher areal specific capacitance (5.79 mF·cm-2) than that of the pyrolyzed carbonbased MSC (1.67 mF·cm-2) and desirable cycling stability (93.3% capacitance retention after 5,000 cyclic voltammetry cycles).This novel microfabrication process is fully compatible with micromachining technologies,showing great potential for large-scale fine micropatterning of carbon-based composites for applications in micro/nano devices.
doi_str_mv 10.1007/s12274-017-1587-2
format Article
fullrecord <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_journals_2001475774</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><cqvip_id>673533115</cqvip_id><sourcerecordid>2001475774</sourcerecordid><originalsourceid>FETCH-LOGICAL-c343t-d095f4aee473d8c9182302a80f742de705a9578254050148b6e95775cbf127633</originalsourceid><addsrcrecordid>eNp9kMtOwzAURC0EEqXwAewsWIf6GSdLVPGSitjA2nITp3GV2qntVOrf4ygFdtyNr6U5M7oDwC1GDxghsQiYEMEyhEWGeSEycgZmuCyLDKU5_9kxYZfgKoQtQjnBrJiB9t1U3oXohyoO3tgNdA2slF87u4jGwv2gbBx2sHYxwINRUEHrDrqDfeui60xs3carvj1CZWvYH73rjsGEzOs6ORpnYe9dpUO4BheN6oK-Ob1z8PX89Ll8zVYfL2_Lx1VWUUZjVqOSN0xpzQSti6rEBaGIqAI1gpFaC8RVyUVBOEMcpQvWuU5_wat1g4nIKZ2D-8k35e4HHaLcusHbFCkJSoRIapZUeFKNxwevG9l7s1P-KDGSY6FyKlSmQuVYqCSJIRMT-rEo7f-c_4PuTkGts5t94n6TckE5pRhz-g1ddYTs</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>2001475774</pqid></control><display><type>article</type><title>Microstructuring of carbon/tin quantum dots via a novel photolithography and pyrolysis-reduction process</title><source>SpringerNature Journals</source><creator>Hong, Xufeng ; He, Liang ; Ma, Xinyu ; Yang, Wei ; Chen, Yiming ; Zhang, Lei ; Yan, Haowu ; Li, Zhaohuai ; Mai, Liqiang</creator><creatorcontrib>Hong, Xufeng ; He, Liang ; Ma, Xinyu ; Yang, Wei ; Chen, Yiming ; Zhang, Lei ; Yan, Haowu ; Li, Zhaohuai ; Mai, Liqiang</creatorcontrib><description>A novel microfabrication process based on optimized photolithography combined with pyrolysis-reduction is proposed to fabricate interdigital porous carbon/tin quantum dots (C/Sn QDs) microelectrodes.C/Sn QDs active microelectrodes are also employed as current collectors of a micro-supercapacitor (MSC).A uniform dispersion of Sn QDs (diameter of ~3 nm) in the carbon matrix is achieved using our facile and controllable microfabrication process.The as-fabricated C/Sn QDs MSC obtained by carbonization at 900 ℃ exhibits a higher areal specific capacitance (5.79 mF&#183;cm-2) than that of the pyrolyzed carbonbased MSC (1.67 mF&#183;cm-2) and desirable cycling stability (93.3% capacitance retention after 5,000 cyclic voltammetry cycles).This novel microfabrication process is fully compatible with micromachining technologies,showing great potential for large-scale fine micropatterning of carbon-based composites for applications in micro/nano devices.</description><identifier>ISSN: 1998-0124</identifier><identifier>EISSN: 1998-0000</identifier><identifier>DOI: 10.1007/s12274-017-1587-2</identifier><language>eng</language><publisher>Beijing: Tsinghua University Press</publisher><subject>Accumulators ; Atomic/Molecular Structure and Spectra ; Biomedicine ; Biotechnology ; Capacitance ; Carbon ; Carbonization ; Chemistry and Materials Science ; Condensed Matter Physics ; Materials Science ; Microelectrodes ; Micromachining ; Micropatterning ; Nanotechnology ; Photolithography ; Pyrolysis ; Quantum dots ; Reduction ; Research Article ; Tin</subject><ispartof>Nano research, 2017-11, Vol.10 (11), p.3743-3753</ispartof><rights>Tsinghua University Press and Springer-Verlag GmbH Germany 2017</rights><rights>Nano Research is a copyright of Springer, (2017). All Rights Reserved.</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c343t-d095f4aee473d8c9182302a80f742de705a9578254050148b6e95775cbf127633</citedby><cites>FETCH-LOGICAL-c343t-d095f4aee473d8c9182302a80f742de705a9578254050148b6e95775cbf127633</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Uhttp://image.cqvip.com/vip1000/qk/71233X/71233X.jpg</thumbnail><linktopdf>$$Uhttps://link.springer.com/content/pdf/10.1007/s12274-017-1587-2$$EPDF$$P50$$Gspringer$$H</linktopdf><linktohtml>$$Uhttps://link.springer.com/10.1007/s12274-017-1587-2$$EHTML$$P50$$Gspringer$$H</linktohtml><link.rule.ids>314,780,784,27924,27925,41488,42557,51319</link.rule.ids></links><search><creatorcontrib>Hong, Xufeng</creatorcontrib><creatorcontrib>He, Liang</creatorcontrib><creatorcontrib>Ma, Xinyu</creatorcontrib><creatorcontrib>Yang, Wei</creatorcontrib><creatorcontrib>Chen, Yiming</creatorcontrib><creatorcontrib>Zhang, Lei</creatorcontrib><creatorcontrib>Yan, Haowu</creatorcontrib><creatorcontrib>Li, Zhaohuai</creatorcontrib><creatorcontrib>Mai, Liqiang</creatorcontrib><title>Microstructuring of carbon/tin quantum dots via a novel photolithography and pyrolysis-reduction process</title><title>Nano research</title><addtitle>Nano Res</addtitle><addtitle>Nano Research</addtitle><description>A novel microfabrication process based on optimized photolithography combined with pyrolysis-reduction is proposed to fabricate interdigital porous carbon/tin quantum dots (C/Sn QDs) microelectrodes.C/Sn QDs active microelectrodes are also employed as current collectors of a micro-supercapacitor (MSC).A uniform dispersion of Sn QDs (diameter of ~3 nm) in the carbon matrix is achieved using our facile and controllable microfabrication process.The as-fabricated C/Sn QDs MSC obtained by carbonization at 900 ℃ exhibits a higher areal specific capacitance (5.79 mF&#183;cm-2) than that of the pyrolyzed carbonbased MSC (1.67 mF&#183;cm-2) and desirable cycling stability (93.3% capacitance retention after 5,000 cyclic voltammetry cycles).This novel microfabrication process is fully compatible with micromachining technologies,showing great potential for large-scale fine micropatterning of carbon-based composites for applications in micro/nano devices.</description><subject>Accumulators</subject><subject>Atomic/Molecular Structure and Spectra</subject><subject>Biomedicine</subject><subject>Biotechnology</subject><subject>Capacitance</subject><subject>Carbon</subject><subject>Carbonization</subject><subject>Chemistry and Materials Science</subject><subject>Condensed Matter Physics</subject><subject>Materials Science</subject><subject>Microelectrodes</subject><subject>Micromachining</subject><subject>Micropatterning</subject><subject>Nanotechnology</subject><subject>Photolithography</subject><subject>Pyrolysis</subject><subject>Quantum dots</subject><subject>Reduction</subject><subject>Research Article</subject><subject>Tin</subject><issn>1998-0124</issn><issn>1998-0000</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2017</creationdate><recordtype>article</recordtype><sourceid>ABUWG</sourceid><sourceid>AFKRA</sourceid><sourceid>AZQEC</sourceid><sourceid>BENPR</sourceid><sourceid>CCPQU</sourceid><sourceid>DWQXO</sourceid><sourceid>GNUQQ</sourceid><recordid>eNp9kMtOwzAURC0EEqXwAewsWIf6GSdLVPGSitjA2nITp3GV2qntVOrf4ygFdtyNr6U5M7oDwC1GDxghsQiYEMEyhEWGeSEycgZmuCyLDKU5_9kxYZfgKoQtQjnBrJiB9t1U3oXohyoO3tgNdA2slF87u4jGwv2gbBx2sHYxwINRUEHrDrqDfeui60xs3carvj1CZWvYH73rjsGEzOs6ORpnYe9dpUO4BheN6oK-Ob1z8PX89Ll8zVYfL2_Lx1VWUUZjVqOSN0xpzQSti6rEBaGIqAI1gpFaC8RVyUVBOEMcpQvWuU5_wat1g4nIKZ2D-8k35e4HHaLcusHbFCkJSoRIapZUeFKNxwevG9l7s1P-KDGSY6FyKlSmQuVYqCSJIRMT-rEo7f-c_4PuTkGts5t94n6TckE5pRhz-g1ddYTs</recordid><startdate>20171101</startdate><enddate>20171101</enddate><creator>Hong, Xufeng</creator><creator>He, Liang</creator><creator>Ma, Xinyu</creator><creator>Yang, Wei</creator><creator>Chen, Yiming</creator><creator>Zhang, Lei</creator><creator>Yan, Haowu</creator><creator>Li, Zhaohuai</creator><creator>Mai, Liqiang</creator><general>Tsinghua University Press</general><general>Springer Nature B.V</general><scope>2RA</scope><scope>92L</scope><scope>CQIGP</scope><scope>~WA</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>3V.</scope><scope>7QF</scope><scope>7QO</scope><scope>7QQ</scope><scope>7SE</scope><scope>7SR</scope><scope>7U5</scope><scope>7X7</scope><scope>7XB</scope><scope>8AO</scope><scope>8BQ</scope><scope>8FD</scope><scope>8FE</scope><scope>8FG</scope><scope>8FH</scope><scope>8FI</scope><scope>8FJ</scope><scope>8FK</scope><scope>ABJCF</scope><scope>ABUWG</scope><scope>AFKRA</scope><scope>AZQEC</scope><scope>BBNVY</scope><scope>BENPR</scope><scope>BGLVJ</scope><scope>BHPHI</scope><scope>CCPQU</scope><scope>D1I</scope><scope>DWQXO</scope><scope>FR3</scope><scope>FYUFA</scope><scope>GHDGH</scope><scope>GNUQQ</scope><scope>H8G</scope><scope>HCIFZ</scope><scope>JG9</scope><scope>K9.</scope><scope>KB.</scope><scope>L7M</scope><scope>LK8</scope><scope>M0S</scope><scope>M7P</scope><scope>P64</scope><scope>PDBOC</scope><scope>PQEST</scope><scope>PQQKQ</scope><scope>PQUKI</scope></search><sort><creationdate>20171101</creationdate><title>Microstructuring of carbon/tin quantum dots via a novel photolithography and pyrolysis-reduction process</title><author>Hong, Xufeng ; He, Liang ; Ma, Xinyu ; Yang, Wei ; Chen, Yiming ; Zhang, Lei ; Yan, Haowu ; Li, Zhaohuai ; Mai, Liqiang</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c343t-d095f4aee473d8c9182302a80f742de705a9578254050148b6e95775cbf127633</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2017</creationdate><topic>Accumulators</topic><topic>Atomic/Molecular Structure and Spectra</topic><topic>Biomedicine</topic><topic>Biotechnology</topic><topic>Capacitance</topic><topic>Carbon</topic><topic>Carbonization</topic><topic>Chemistry and Materials Science</topic><topic>Condensed Matter Physics</topic><topic>Materials Science</topic><topic>Microelectrodes</topic><topic>Micromachining</topic><topic>Micropatterning</topic><topic>Nanotechnology</topic><topic>Photolithography</topic><topic>Pyrolysis</topic><topic>Quantum dots</topic><topic>Reduction</topic><topic>Research Article</topic><topic>Tin</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Hong, Xufeng</creatorcontrib><creatorcontrib>He, Liang</creatorcontrib><creatorcontrib>Ma, Xinyu</creatorcontrib><creatorcontrib>Yang, Wei</creatorcontrib><creatorcontrib>Chen, Yiming</creatorcontrib><creatorcontrib>Zhang, Lei</creatorcontrib><creatorcontrib>Yan, Haowu</creatorcontrib><creatorcontrib>Li, Zhaohuai</creatorcontrib><creatorcontrib>Mai, Liqiang</creatorcontrib><collection>中文科技期刊数据库</collection><collection>中文科技期刊数据库-CALIS站点</collection><collection>中文科技期刊数据库-7.0平台</collection><collection>中文科技期刊数据库- 镜像站点</collection><collection>CrossRef</collection><collection>ProQuest Central (Corporate)</collection><collection>Aluminium Industry Abstracts</collection><collection>Biotechnology Research Abstracts</collection><collection>Ceramic Abstracts</collection><collection>Corrosion Abstracts</collection><collection>Engineered Materials Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Health &amp; Medical Collection</collection><collection>ProQuest Central (purchase pre-March 2016)</collection><collection>ProQuest Pharma Collection</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>ProQuest SciTech Collection</collection><collection>ProQuest Technology Collection</collection><collection>ProQuest Natural Science Collection</collection><collection>Hospital Premium Collection</collection><collection>Hospital Premium Collection (Alumni Edition)</collection><collection>ProQuest Central (Alumni) (purchase pre-March 2016)</collection><collection>Materials Science &amp; Engineering Collection</collection><collection>ProQuest Central (Alumni Edition)</collection><collection>ProQuest Central UK/Ireland</collection><collection>ProQuest Central Essentials</collection><collection>Biological Science Collection</collection><collection>ProQuest Central</collection><collection>Technology Collection</collection><collection>Natural Science Collection</collection><collection>ProQuest One Community College</collection><collection>ProQuest Materials Science Collection</collection><collection>ProQuest Central Korea</collection><collection>Engineering Research Database</collection><collection>Health Research Premium Collection</collection><collection>Health Research Premium Collection (Alumni)</collection><collection>ProQuest Central Student</collection><collection>Copper Technical Reference Library</collection><collection>SciTech Premium Collection</collection><collection>Materials Research Database</collection><collection>ProQuest Health &amp; Medical Complete (Alumni)</collection><collection>Materials Science Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>ProQuest Biological Science Collection</collection><collection>Health &amp; Medical Collection (Alumni Edition)</collection><collection>Biological Science Database</collection><collection>Biotechnology and BioEngineering Abstracts</collection><collection>Materials Science Collection</collection><collection>ProQuest One Academic Eastern Edition (DO NOT USE)</collection><collection>ProQuest One Academic</collection><collection>ProQuest One Academic UKI Edition</collection><jtitle>Nano research</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Hong, Xufeng</au><au>He, Liang</au><au>Ma, Xinyu</au><au>Yang, Wei</au><au>Chen, Yiming</au><au>Zhang, Lei</au><au>Yan, Haowu</au><au>Li, Zhaohuai</au><au>Mai, Liqiang</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Microstructuring of carbon/tin quantum dots via a novel photolithography and pyrolysis-reduction process</atitle><jtitle>Nano research</jtitle><stitle>Nano Res</stitle><addtitle>Nano Research</addtitle><date>2017-11-01</date><risdate>2017</risdate><volume>10</volume><issue>11</issue><spage>3743</spage><epage>3753</epage><pages>3743-3753</pages><issn>1998-0124</issn><eissn>1998-0000</eissn><abstract>A novel microfabrication process based on optimized photolithography combined with pyrolysis-reduction is proposed to fabricate interdigital porous carbon/tin quantum dots (C/Sn QDs) microelectrodes.C/Sn QDs active microelectrodes are also employed as current collectors of a micro-supercapacitor (MSC).A uniform dispersion of Sn QDs (diameter of ~3 nm) in the carbon matrix is achieved using our facile and controllable microfabrication process.The as-fabricated C/Sn QDs MSC obtained by carbonization at 900 ℃ exhibits a higher areal specific capacitance (5.79 mF&#183;cm-2) than that of the pyrolyzed carbonbased MSC (1.67 mF&#183;cm-2) and desirable cycling stability (93.3% capacitance retention after 5,000 cyclic voltammetry cycles).This novel microfabrication process is fully compatible with micromachining technologies,showing great potential for large-scale fine micropatterning of carbon-based composites for applications in micro/nano devices.</abstract><cop>Beijing</cop><pub>Tsinghua University Press</pub><doi>10.1007/s12274-017-1587-2</doi><tpages>11</tpages></addata></record>
fulltext fulltext
identifier ISSN: 1998-0124
ispartof Nano research, 2017-11, Vol.10 (11), p.3743-3753
issn 1998-0124
1998-0000
language eng
recordid cdi_proquest_journals_2001475774
source SpringerNature Journals
subjects Accumulators
Atomic/Molecular Structure and Spectra
Biomedicine
Biotechnology
Capacitance
Carbon
Carbonization
Chemistry and Materials Science
Condensed Matter Physics
Materials Science
Microelectrodes
Micromachining
Micropatterning
Nanotechnology
Photolithography
Pyrolysis
Quantum dots
Reduction
Research Article
Tin
title Microstructuring of carbon/tin quantum dots via a novel photolithography and pyrolysis-reduction process
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-27T05%3A49%3A07IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Microstructuring%20of%20carbon/tin%20quantum%20dots%20via%20a%20novel%20photolithography%20and%20pyrolysis-reduction%20process&rft.jtitle=Nano%20research&rft.au=Hong,%20Xufeng&rft.date=2017-11-01&rft.volume=10&rft.issue=11&rft.spage=3743&rft.epage=3753&rft.pages=3743-3753&rft.issn=1998-0124&rft.eissn=1998-0000&rft_id=info:doi/10.1007/s12274-017-1587-2&rft_dat=%3Cproquest_cross%3E2001475774%3C/proquest_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=2001475774&rft_id=info:pmid/&rft_cqvip_id=673533115&rfr_iscdi=true