Microstructuring of carbon/tin quantum dots via a novel photolithography and pyrolysis-reduction process

A novel microfabrication process based on optimized photolithography combined with pyrolysis-reduction is proposed to fabricate interdigital porous carbon/tin quantum dots （C/Sn QDs） microelectrodes.C/Sn QDs active microelectrodes are also employed as current collectors of a micro-supercapacitor （MSC）.A uniform dispersion of Sn QDs （diameter of ～3 nm） in the carbon matrix is achieved using our facile and controllable microfabrication process.The as-fabricated C/Sn QDs MSC obtained by carbonization at 900 ℃ exhibits a higher areal specific capacitance （5.79 mF＆#183;cm-2） than that of the pyrolyzed carbonbased MSC （1.67 mF＆#183;cm-2） and desirable cycling stability （93.3% capacitance retention after 5,000 cyclic voltammetry cycles）.This novel microfabrication process is fully compatible with micromachining technologies,showing great potential for large-scale fine micropatterning of carbon-based composites for applications in micro/nano devices.