Optically Immersed Bolometer IR Detectors Based on V2O5 Thin Films with Polyimide Thermal Impedance Control Layer for Space Applications

Optically immersed bolometer IR detectors were fabricated using electron beam evaporated vanadium oxide as the sensing material. Spin-coated polyimide was used as medium to optically immerse the sensing element to the flat surface of a hemispherical germanium lens. This optical immersion layer also serves as the thermal impedance control layer and decides the performance of the devices in terms of responsivity and noise parameters. The devices were packaged in suitable electro-optical packages and the detector parameters were studied in detail. Thermal time constant varies from 0.57 to 6.0 ms and responsivity from 75 to 757 V W −1 corresponding to polyimide thickness in the range 2 to 70 μm for a detector bias of 9 V in the wavelength region of 14–16 μm. Highest D* obtained was 1.2×10 8 cmHz 1/2 W −1 . Noise equivalent temperature difference (NETD) of 20 mK was achieved for devices with polyimide thickness more than 32 μm. The figure of merit, NETD × τ product which describes trade-off between thermal time constant and sensitivity is also extensively studied for devices having different thickness of thermal impedance layers.