Atmospheric Pressure Planar Radio Frequency Discharge With Isolated Electrodes: Glow Features and Application Prospects

Atmospheric Pressure Planar Radio Frequency Discharge With Isolated Electrodes: Glow Features and Application Prospects

Operation characteristics of RF planar barrier discharge in atmospheric pressure argon appropriate for obtaining the discharge extension outside the electrodes in a form of planar plasma jet are determined experimentally. The plasma jet images and spatial distributions of its light emission intensit...

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Veröffentlicht in:IEEE transactions on plasma science 2017-12, Vol.45 (12), p.3218-3223
Hauptverfasser: Bazhenov, Volodymyr Yu, Chaplynskyi, Roman Yu, Kravchuk, Ruslan M., Kuzmichev, Anatoly I., Tsiolko, Vyacheslav V., Yaroshchuk, Oleg V.
Format: Artikel
Sprache:eng
Schlagworte:
Argon
Atmospheric pressure
Discharge
Discharges (electric)
Electrodes
Light emission
Liquid crystals
Luminous intensity
Plasma applications
Plasma properties
Radio frequency
Radio frequency discharge
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Zusammenfassung:Operation characteristics of RF planar barrier discharge in atmospheric pressure argon appropriate for obtaining the discharge extension outside the electrodes in a form of planar plasma jet are determined experimentally. The plasma jet images and spatial distributions of its light emission intensity are presented, and their features are discussed. The prospects of studied jet discharge for creation of liquid crystal alignment and etching polymer materials are demonstrated.
ISSN:0093-3813
1939-9375
DOI:10.1109/TPS.2017.2770223