Lifetime and migration length of B-related admolecules on diamond {100}-surface: Comparative study of hot-filament and microwave plasma-enhanced chemical vapor deposition

•B incorporation behavior into {100}-surface were compared between HF and MWCVD.•Lifetime (τ) and surface migration (χB) of B-related admolecules were calculated.•Longer τ and χB were evidenced for HF growth due to less impact of surface etching.•Enhanced growth rate by B-doping was firstly confirme...

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Veröffentlicht in:Journal of crystal growth 2017-12, Vol.479, p.52-58
Hauptverfasser: Ohmagari, Shinya, Ogura, Masahiko, Umezawa, Hitoshi, Mokuno, Yoshiaki
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Sprache:eng
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