Solid-silica core/mesoporous-silica shell composite abrasives: synthesis, characterization, and the effect of mesoporous shell structures on CMP

The silica-based composite abrasive particles containing solid silica (sSiO 2 ) cores and mesoporous silica (mSiO 2 ) shells exhibit potential applications in efficient and damage-free chemical mechanical polishing (CMP) due to their special mechanical and/or chemical characteristics. In this work, the composite particles composed of sSiO 2 cores and worm-like mesoporous silica shells (sSiO 2 /W-mSiO 2 ) or dendritic mesoporous shells (sSiO 2 /D-mSiO 2 ) were obtained by a modified Stöber method combined with a biphase stratification approach. And the effects of mSiO 2 shell structures of the silica-based composites on oxide CMP performance and structural stability were further investigated. TEM and XRD analyses revealed that the sSiO 2 /W-mSiO 2 composites exhibited an improved mesochannel organization in silica shells with respect to the sSiO 2 /D-mSiO 2 particles. The polishing results showed that the substrates after finishing with the as-obtained silica-based composite abrasives presented a superior surface quality with respect to conventional solid silica particles with a comparable particle size. Moreover, an improved organization in silica shells contributed to the improvement of surface quality and mechanical stability during CMP processes. In addition, the sSiO 2 /D-mSiO 2 abrasives exhibited an enhanced material removal rate by comparison with the sSiO 2 /W-mSiO 2 under the same CMP conditions. This work provides an experimental basis for exploring the relationship between the polishing performance and the mesoporous shell structure of silica-based composite abrasives.