Impurity composition of monoisotopic 28SiF4 silicon tetrafluoride

The impurity composition of 28 SiF 4 has been studied for the first time by gas chromatography/mass spectrometry using gas-adsorption capillary columns. For identification and determination of impurity substances by gas chromatography/mass spectrometry, we have proposed using cryogenic preconcentration of the impurities from 28 SiF 4 . The presence of C 2 –C 4 hydrocarbon impurities and sulfur hexafluoride has been confirmed. We have identified 35 impurity substances in 28 SiF 4 , including linear and branched C 5 –C 8 saturated hydrocarbons, aromatic hydrocarbons, chlorine- and fluorine-containing hydrocarbons, and silicon- and sulfur-containing substances, of which 28 have been detected for the first time.