Determination of mass absorption coefficient in two-layer thin-film Cr/V and V/Cr systems by X-ray fluorescence spectrometry

A method is proposed for the determination of mass absorption coefficient in the analysis of two-layer thin-film V/Cr and Cr/V systems on Polikor substrates by X-ray fluorescence spectrometry. Simply fabricated and unified film layers formed by applying vanadium and chromium on polymer film substrates are used. Correction coefficients taking into account the attenuation of primary radiation of X-ray tube and analytical line of an element from the lower layer in the upper layer are calculated.