Time-resolved diagnostics in a pulsed, electron beam-generated plasma

Time-resolved diagnostics in a pulsed, electron beam-generated plasma

Time-resolved ion flux and energy distributions were measured at an electrode located adjacent to a pulsed, electron beam-generated plasma produced in argon. A Langmuir probe was also used to determine time-dependent electron temperature and plasma density. Temporal variations in the incident Ar/sup...

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Veröffentlicht in:IEEE transactions on plasma science 2005-04, Vol.33 (2), p.838-843
Hauptverfasser: Walton, S.G., Leonhardt, D., Fernsler, R.F.
Format: Artikel
Sprache:eng
Schlagworte:
Argon
Diagnostic systems
Electrodes
Electron beams
Electron temperature
Electrons
Energy measurement
Evolution
Exact sciences and technology
Flux
Ion energy measurement
Ion flux
Ions
Mass spectrometry
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Plasma
Plasma density
Plasma diagnostic techniques and instrumentation
Plasma diagnostics
Plasma measurements
Plasma temperature
Probes
Pulse measurements
pulsed plasmas
Temporal logic
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Beschreibung
Zusammenfassung:Time-resolved ion flux and energy distributions were measured at an electrode located adjacent to a pulsed, electron beam-generated plasma produced in argon. A Langmuir probe was also used to determine time-dependent electron temperature and plasma density. Temporal variations in the incident Ar/sup +/ and Ar/sup +2/ ion energy and flux were correlated to changes in the electron temperature and plasma density. The evolution of the plasma density and ion flux is understood by considering the loss mechanisms of each ion species.
ISSN:0093-3813
1939-9375
DOI:10.1109/TPS.2005.845239