Vacuum-arc-generated macroparticles in the nanometer range

Micron and submicron "macroparticles" are produced along with the plasma at vacuum arc cathode spots. Published data refer to the size range 0.2-100 /spl mu/m. The lower limit is determined by the resolution of the equipment used (usually scanning electron microscopes). In the present stud...

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Veröffentlicht in:	IEEE Transactions on Plasma Science 1999-08, Vol.27 (4), p.1030-1033
Hauptverfasser:	Monteiro, O.R., Anders, A.
Format:	Artikel
Sprache:	eng
Schlagworte:	Atomic force microscopy Atoms & subatomic particles CARBON Cathodes Distribution functions ELECTRIC ARCS Filtering Filters GOLD Information filtering Information filters Macroparticles MAGNETIC FILTERS Magnetic separation Magnetism MATERIALS SCIENCE Nanocomposites Nanomaterials Nanoparticles Nanostructure PARTICLE SIZE Plasmas Scanning electron microscopy Spots TITANIUM Vacuum arcs VACUUM COATING
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Beschreibung
Zusammenfassung:	Micron and submicron "macroparticles" are produced along with the plasma at vacuum arc cathode spots. Published data refer to the size range 0.2-100 /spl mu/m. The lower limit is determined by the resolution of the equipment used (usually scanning electron microscopes). In the present study we focus on the detection and characterization of nanosize macroparticles ("nanoparticles") using atomic force microscopy and fieid-emission scanning electron microscopy. New information is gathered on material-dependent size distribution functions as well as on the effectiveness of magnetic filtering for nanoparticles.
ISSN:	0093-3813 1939-9375
DOI:	10.1109/27.782276