Charge transport studies on Si nanopillars for photodetectors fabricated using vapor phase metal-assisted chemical etching
Si nanopillars (SiNPLs) were fabricated using a novel vapor phase metal-assisted chemical etching (V-Mace) and nanosphere lithography. The temperature dependent current–voltage ( I–V ) characteristics have been studied over a broad temperature range 170–360 K. The SiNPLs show a Schottky diode-like b...
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Veröffentlicht in: | Applied physics. A, Materials science & processing Materials science & processing, 2017-11, Vol.123 (11), p.1-10, Article 681 |
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Hauptverfasser: | , , , , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | Si nanopillars (SiNPLs) were fabricated using a novel vapor phase metal-assisted chemical etching (V-Mace) and nanosphere lithography. The temperature dependent current–voltage (
I–V
) characteristics have been studied over a broad temperature range 170–360 K. The SiNPLs show a Schottky diode-like behavior at a temperature below 300 K and the rectification (about two orders of magnitude) is more prominent at temperature |
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ISSN: | 0947-8396 1432-0630 |
DOI: | 10.1007/s00339-017-1287-5 |