All-solid-state microscale lithium-ion battery fabricated by a simple process with graphene as anode

•A simple manufacture process is developed for fabricating the micro battery array.•Ultrathin Graphene film is used as the anode for micro lithium-ion batteries.•The micro batteries exhibit apparent voltage plateaus and favorable capacity values. Few works directly utilize monolayer or few-layer Graphene in energy storage because of the limited active materials. But it can be exploited in micro-power sources with low-rise power requirement, especially the microscale thin film lithium-ion batteries (MBs). Here a simple micro-fabrication process including one-step magnetron sputtering, is developed for fabricating the MBs with the ultrathin Graphene as anode. The footprint area of a single battery is ∼1mm2 and the total thickness is ∼600nm. In the MBs, lithium cobalt oxide (LiCoO2) and lithium phosphorous oxynitride (LiPON) films are used as the cathode and electrolyte, respectively. This work provides guidance to manufacture high performance micro-power devices using advanced materials by a simple process.