High throughput soft embossing process for micro-patterning of PEDOT thin films

The patterning of conductive polymers is a major challenge in the implementation of these materials in several research and industrial applications, spanning from photovoltaics to biosensors. Within this context, we have developed a reliable technique to pattern a thin layer of the conductive polyme...

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Veröffentlicht in:Microelectronic engineering 2017-05, Vol.176, p.15-21
Hauptverfasser: Fanzio, Paola, Cagliani, Alberto, Peterffy, Kristof G., Sasso, Luigi
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Sprache:eng
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Zusammenfassung:The patterning of conductive polymers is a major challenge in the implementation of these materials in several research and industrial applications, spanning from photovoltaics to biosensors. Within this context, we have developed a reliable technique to pattern a thin layer of the conductive polymer poly(3,4-ethylenedioxythiophene) (PEDOT) by means of a low cost and high throughput soft embossing process. We were able to reproduce a functional conductive pattern with a minimum dimension of 1μm and to fabricate electrically decoupled electrodes. Moreover, the conductivity of the PEDOT films has been characterized, finding that a post-processing treatment with Ethylene Glycol allows an increase in conductivity and a decrease in water solubility of the PEDOT film. Finally, cyclic voltammetry demonstrates that the post-treatment also ensures the electrochemical activity of the film. Our technology offers a facile solution for the patterning of organic conductors with resolution in the micro scale, and can be the basis for the realization and development of polymeric microdevices with electrical and electrochemical functionalities. •Development of a soft embossing process for micro-patterning a PEDOT layer•A post processing treatment allows to increase the conductivity and decrease the solubility of PEDOT•Evaluation of replication reliability and structure functionality [Display omitted]
ISSN:0167-9317
1873-5568
DOI:10.1016/j.mee.2017.01.011