Photoluminescence and electrical properties of P-doped ZnTe layers grown by low pressure MOVPE

Photoluminescence (PL) spectra and electrical properties of both as-grown and annealed phosphorus-doped ZnTe layers grown by low-pressure metalorganic vapor phase epitaxy have been clarified as a function of reactor pressure or dopant transport rate. The carrier concentration of as-grown layer incre...

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Veröffentlicht in:Journal of crystal growth 2017-06, Vol.468, p.666-670
Hauptverfasser: Nishio, M., Saito, K., Nakatsuru, Y., Shono, T., Matsuo, Y., Tomota, A., Tanaka, T., Guo, Q.X.
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container_end_page 670
container_issue
container_start_page 666
container_title Journal of crystal growth
container_volume 468
creator Nishio, M.
Saito, K.
Nakatsuru, Y.
Shono, T.
Matsuo, Y.
Tomota, A.
Tanaka, T.
Guo, Q.X.
description Photoluminescence (PL) spectra and electrical properties of both as-grown and annealed phosphorus-doped ZnTe layers grown by low-pressure metalorganic vapor phase epitaxy have been clarified as a function of reactor pressure or dopant transport rate. The carrier concentration of as-grown layer increases with decreasing reactor pressure or increasing dopant transport rate, in good agreement with PL behavior. Similar tendency is also found for annealed layer. Annealing treatment induces the enhancement of the carrier concentration, independent of reactor pressure or dopant transport rate. Through this study, a high carrier concentration near 1019cm−3 has been attainable. •P-doped ZnTe layers were grown by low-pressure metalorganic vapor phase epitaxy.•The layer quality was studied by changing reactor pressure or dopant transport rate.•A high carrier concentration near 1019cm−3 was obtained after annealing.
doi_str_mv 10.1016/j.jcrysgro.2017.01.030
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subjects A1. Doping
A3. Low press. metalorganic vapor phase epitaxy
Annealing
B1. Zinc compounds
B2. Semiconducting II-VI materials
Carrier density
Chemical compounds
Dopants
Electric properties
Electrical properties
Epitaxial growth
Low pressure
Luminescence
Metalorganic chemical vapor deposition
Photoluminescence
Pressure
Transport rate
Zinc tellurides
title Photoluminescence and electrical properties of P-doped ZnTe layers grown by low pressure MOVPE
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