TiF3:TiN nanocomposite thin films – a novel transparent conductor system

Metal matrix nanocomposite thin films consisting of TiF3 nanoparticles embedded in TiN matrix were synthesized with the atomic layer deposition (ALD) method. TiF4, Si2H6 (or Si3H8), and NH3‐based process at 350–370 °C led to nanocomposite TiF3:TiN thin films with the embedded TiF3 nanoparticles in t...

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Veröffentlicht in:	Physica status solidi. C 2017-09, Vol.14 (9), p.n/a
Hauptverfasser:	Blomberg, Tom, Huotari, Hannu, Tuominen, Marko, Lindroos, Linda
Format:	Artikel
Sprache:	eng
Schlagworte:	Atomic layer epitaxy Bright spots Conduction Conductors Crystallites Embedded systems nanocomposite Nanocomposites Nanoparticles Open circuit voltage Photonics photovoltaic cell Photovoltaic cells Photovoltaic effect quantum dots Quartz Silicon dioxide Solar cells Thin films transparent conductor Wafers
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