Shape correction of optical surfaces with subnanometer precision: Problems, status, and prospects

Shape correction of optical surfaces with subnanometer precision: Problems, status, and prospects

The state of art in the field of precise shape correction of mirrors for objectives of projection lithographic systems with an operating wavelength of 13.5 nm at the Institute for Physics of Microstructures, Russian Academy of Sciences is reported. The main problems and nearest prospects are discuss...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Bulletin of the Russian Academy of Sciences. Physics 2008-02, Vol.72 (2), p.188-191
Hauptverfasser: Klyuenkov, E. B., Polkovnikov, V. N., Salashchenko, N. N., Chkhalo, N. I.
Format: Artikel
Sprache:eng
Schlagworte:
Hadrons
Heavy Ions
Nuclear Physics
Physics
Physics and Astronomy
Proceedings of the International Symposium “Nanophysics and Nanoelectronics-2007”
Spherical waves
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page 191
container_issue 2
container_start_page 188
container_title Bulletin of the Russian Academy of Sciences. Physics
container_volume 72
creator Klyuenkov, E. B.
Polkovnikov, V. N.
Salashchenko, N. N.
Chkhalo, N. I.
description The state of art in the field of precise shape correction of mirrors for objectives of projection lithographic systems with an operating wavelength of 13.5 nm at the Institute for Physics of Microstructures, Russian Academy of Sciences is reported. The main problems and nearest prospects are discussed. A new scheme of a precise interferometer with two low-coherent spherical wave sources is proposed.
doi_str_mv 10.1007/s11954-008-2013-4
format Article
fullrecord <record><control><sourceid>proquest_sprin</sourceid><recordid>TN_cdi_proquest_journals_1931812204</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>1931812204</sourcerecordid><originalsourceid>FETCH-LOGICAL-p1414-6b850be051b193b9fe3c6360930f6ffb26506f31a4e052045b1ab816833626d23</originalsourceid><addsrcrecordid>eNpNkM1LAzEQxYMoWKt_gLeAV6OTz-56k-IXFBTUc0i2id3SbtZkF_99p6wHT28GfvPe8Ai55HDDARa3hfNaKwZQMQFcMnVEZryWitVKimOcwQhWLWR1Ss5K2QJoXQs9I-594_pAm5RzaIY2dTRFmvqhbdyOljFH14RCf9phg5vvXJf2YQiZ9oi3Bfk7-paT34V9uaZlcMOI6ro1Aqn0aFnOyUl0uxIu_nROPh8fPpbPbPX69LK8X7GeK66Y8ZUGH0Bzj3_7OgbZGGmglhBNjF4YDSZK7hQyApT23PmKm0pKI8xayDm5mnwx-XsMZbDbNOYOIy0a8ooLvEJKTFTpc9t9hfyPAnuo0k5VWqzSHqq0Sv4CYrpmsQ</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>1931812204</pqid></control><display><type>article</type><title>Shape correction of optical surfaces with subnanometer precision: Problems, status, and prospects</title><source>SpringerLink Journals - AutoHoldings</source><creator>Klyuenkov, E. B. ; Polkovnikov, V. N. ; Salashchenko, N. N. ; Chkhalo, N. I.</creator><creatorcontrib>Klyuenkov, E. B. ; Polkovnikov, V. N. ; Salashchenko, N. N. ; Chkhalo, N. I.</creatorcontrib><description>The state of art in the field of precise shape correction of mirrors for objectives of projection lithographic systems with an operating wavelength of 13.5 nm at the Institute for Physics of Microstructures, Russian Academy of Sciences is reported. The main problems and nearest prospects are discussed. A new scheme of a precise interferometer with two low-coherent spherical wave sources is proposed.</description><identifier>ISSN: 1062-8738</identifier><identifier>EISSN: 1934-9432</identifier><identifier>DOI: 10.1007/s11954-008-2013-4</identifier><language>eng</language><publisher>Heidelberg: Allerton Press, Inc</publisher><subject>Hadrons ; Heavy Ions ; Nuclear Physics ; Physics ; Physics and Astronomy ; Proceedings of the International Symposium “Nanophysics and Nanoelectronics-2007” ; Spherical waves</subject><ispartof>Bulletin of the Russian Academy of Sciences. Physics, 2008-02, Vol.72 (2), p.188-191</ispartof><rights>Allerton Press, Inc. 2008</rights><rights>Bulletin of the Russian Academy of Sciences: Physics is a copyright of Springer, 2008.</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://link.springer.com/content/pdf/10.1007/s11954-008-2013-4$$EPDF$$P50$$Gspringer$$H</linktopdf><linktohtml>$$Uhttps://link.springer.com/10.1007/s11954-008-2013-4$$EHTML$$P50$$Gspringer$$H</linktohtml><link.rule.ids>314,778,782,27911,27912,41475,42544,51306</link.rule.ids></links><search><creatorcontrib>Klyuenkov, E. B.</creatorcontrib><creatorcontrib>Polkovnikov, V. N.</creatorcontrib><creatorcontrib>Salashchenko, N. N.</creatorcontrib><creatorcontrib>Chkhalo, N. I.</creatorcontrib><title>Shape correction of optical surfaces with subnanometer precision: Problems, status, and prospects</title><title>Bulletin of the Russian Academy of Sciences. Physics</title><addtitle>Bull. Russ. Acad. Sci. Phys</addtitle><description>The state of art in the field of precise shape correction of mirrors for objectives of projection lithographic systems with an operating wavelength of 13.5 nm at the Institute for Physics of Microstructures, Russian Academy of Sciences is reported. The main problems and nearest prospects are discussed. A new scheme of a precise interferometer with two low-coherent spherical wave sources is proposed.</description><subject>Hadrons</subject><subject>Heavy Ions</subject><subject>Nuclear Physics</subject><subject>Physics</subject><subject>Physics and Astronomy</subject><subject>Proceedings of the International Symposium “Nanophysics and Nanoelectronics-2007”</subject><subject>Spherical waves</subject><issn>1062-8738</issn><issn>1934-9432</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2008</creationdate><recordtype>article</recordtype><sourceid>AFKRA</sourceid><sourceid>BENPR</sourceid><sourceid>CCPQU</sourceid><sourceid>DWQXO</sourceid><recordid>eNpNkM1LAzEQxYMoWKt_gLeAV6OTz-56k-IXFBTUc0i2id3SbtZkF_99p6wHT28GfvPe8Ai55HDDARa3hfNaKwZQMQFcMnVEZryWitVKimOcwQhWLWR1Ss5K2QJoXQs9I-594_pAm5RzaIY2dTRFmvqhbdyOljFH14RCf9phg5vvXJf2YQiZ9oi3Bfk7-paT34V9uaZlcMOI6ro1Aqn0aFnOyUl0uxIu_nROPh8fPpbPbPX69LK8X7GeK66Y8ZUGH0Bzj3_7OgbZGGmglhBNjF4YDSZK7hQyApT23PmKm0pKI8xayDm5mnwx-XsMZbDbNOYOIy0a8ooLvEJKTFTpc9t9hfyPAnuo0k5VWqzSHqq0Sv4CYrpmsQ</recordid><startdate>200802</startdate><enddate>200802</enddate><creator>Klyuenkov, E. B.</creator><creator>Polkovnikov, V. N.</creator><creator>Salashchenko, N. N.</creator><creator>Chkhalo, N. I.</creator><general>Allerton Press, Inc</general><general>Springer Nature B.V</general><scope>8FE</scope><scope>8FG</scope><scope>AFKRA</scope><scope>ARAPS</scope><scope>BENPR</scope><scope>BGLVJ</scope><scope>CCPQU</scope><scope>DWQXO</scope><scope>HCIFZ</scope><scope>P5Z</scope><scope>P62</scope><scope>PQEST</scope><scope>PQQKQ</scope><scope>PQUKI</scope><scope>PRINS</scope></search><sort><creationdate>200802</creationdate><title>Shape correction of optical surfaces with subnanometer precision: Problems, status, and prospects</title><author>Klyuenkov, E. B. ; Polkovnikov, V. N. ; Salashchenko, N. N. ; Chkhalo, N. I.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-p1414-6b850be051b193b9fe3c6360930f6ffb26506f31a4e052045b1ab816833626d23</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2008</creationdate><topic>Hadrons</topic><topic>Heavy Ions</topic><topic>Nuclear Physics</topic><topic>Physics</topic><topic>Physics and Astronomy</topic><topic>Proceedings of the International Symposium “Nanophysics and Nanoelectronics-2007”</topic><topic>Spherical waves</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Klyuenkov, E. B.</creatorcontrib><creatorcontrib>Polkovnikov, V. N.</creatorcontrib><creatorcontrib>Salashchenko, N. N.</creatorcontrib><creatorcontrib>Chkhalo, N. I.</creatorcontrib><collection>ProQuest SciTech Collection</collection><collection>ProQuest Technology Collection</collection><collection>ProQuest Central UK/Ireland</collection><collection>Advanced Technologies &amp; Aerospace Collection</collection><collection>ProQuest Central</collection><collection>Technology Collection (ProQuest)</collection><collection>ProQuest One Community College</collection><collection>ProQuest Central Korea</collection><collection>SciTech Premium Collection</collection><collection>Advanced Technologies &amp; Aerospace Database</collection><collection>ProQuest Advanced Technologies &amp; Aerospace Collection</collection><collection>ProQuest One Academic Eastern Edition (DO NOT USE)</collection><collection>ProQuest One Academic</collection><collection>ProQuest One Academic UKI Edition</collection><collection>ProQuest Central China</collection><jtitle>Bulletin of the Russian Academy of Sciences. Physics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Klyuenkov, E. B.</au><au>Polkovnikov, V. N.</au><au>Salashchenko, N. N.</au><au>Chkhalo, N. I.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Shape correction of optical surfaces with subnanometer precision: Problems, status, and prospects</atitle><jtitle>Bulletin of the Russian Academy of Sciences. Physics</jtitle><stitle>Bull. Russ. Acad. Sci. Phys</stitle><date>2008-02</date><risdate>2008</risdate><volume>72</volume><issue>2</issue><spage>188</spage><epage>191</epage><pages>188-191</pages><issn>1062-8738</issn><eissn>1934-9432</eissn><abstract>The state of art in the field of precise shape correction of mirrors for objectives of projection lithographic systems with an operating wavelength of 13.5 nm at the Institute for Physics of Microstructures, Russian Academy of Sciences is reported. The main problems and nearest prospects are discussed. A new scheme of a precise interferometer with two low-coherent spherical wave sources is proposed.</abstract><cop>Heidelberg</cop><pub>Allerton Press, Inc</pub><doi>10.1007/s11954-008-2013-4</doi><tpages>4</tpages></addata></record>
fulltext fulltext
identifier ISSN: 1062-8738
ispartof Bulletin of the Russian Academy of Sciences. Physics, 2008-02, Vol.72 (2), p.188-191
issn 1062-8738
1934-9432
language eng
recordid cdi_proquest_journals_1931812204
source SpringerLink Journals - AutoHoldings
subjects Hadrons
Heavy Ions
Nuclear Physics
Physics
Physics and Astronomy
Proceedings of the International Symposium “Nanophysics and Nanoelectronics-2007”
Spherical waves
title Shape correction of optical surfaces with subnanometer precision: Problems, status, and prospects
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-16T04%3A24%3A39IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_sprin&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Shape%20correction%20of%20optical%20surfaces%20with%20subnanometer%20precision:%20Problems,%20status,%20and%20prospects&rft.jtitle=Bulletin%20of%20the%20Russian%20Academy%20of%20Sciences.%20Physics&rft.au=Klyuenkov,%20E.%20B.&rft.date=2008-02&rft.volume=72&rft.issue=2&rft.spage=188&rft.epage=191&rft.pages=188-191&rft.issn=1062-8738&rft.eissn=1934-9432&rft_id=info:doi/10.1007/s11954-008-2013-4&rft_dat=%3Cproquest_sprin%3E1931812204%3C/proquest_sprin%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=1931812204&rft_id=info:pmid/&rfr_iscdi=true