Shape correction of optical surfaces with subnanometer precision: Problems, status, and prospects

The state of art in the field of precise shape correction of mirrors for objectives of projection lithographic systems with an operating wavelength of 13.5 nm at the Institute for Physics of Microstructures, Russian Academy of Sciences is reported. The main problems and nearest prospects are discuss...

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Veröffentlicht in:	Bulletin of the Russian Academy of Sciences. Physics 2008-02, Vol.72 (2), p.188-191
Hauptverfasser:	Klyuenkov, E. B., Polkovnikov, V. N., Salashchenko, N. N., Chkhalo, N. I.
Format:	Artikel
Sprache:	eng
Schlagworte:	Hadrons Heavy Ions Nuclear Physics Physics Physics and Astronomy Proceedings of the International Symposium “Nanophysics and Nanoelectronics-2007” Spherical waves
Online-Zugang:	Volltext
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Zusammenfassung:	The state of art in the field of precise shape correction of mirrors for objectives of projection lithographic systems with an operating wavelength of 13.5 nm at the Institute for Physics of Microstructures, Russian Academy of Sciences is reported. The main problems and nearest prospects are discussed. A new scheme of a precise interferometer with two low-coherent spherical wave sources is proposed.
ISSN:	1062-8738 1934-9432
DOI:	10.1007/s11954-008-2013-4