Raman study of W-doped diamond-like carbon films

Amorphous diamond-like carbon (DLC) films prepared by the plasma chemical method on glass substrates SiO 2 -Al 2 O 3 -TiO 2 have been studied by Raman spectroscopy. W-doped DLC films show a considerable increase in the G -band frequency up to 1592 cm −1 and an enhanced surface hardness. The DLC film...

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Veröffentlicht in:Bulletin of the Russian Academy of Sciences. Physics 2009-07, Vol.73 (7), p.874-877
Hauptverfasser: Goryainov, S. V., Pan, Yu, Madyukov, I. A.
Format: Artikel
Sprache:eng
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Zusammenfassung:Amorphous diamond-like carbon (DLC) films prepared by the plasma chemical method on glass substrates SiO 2 -Al 2 O 3 -TiO 2 have been studied by Raman spectroscopy. W-doped DLC films show a considerable increase in the G -band frequency up to 1592 cm −1 and an enhanced surface hardness. The DLC films doped with W and atoms of semiconductors exhibit high transparency and a higher G -band shift to the high-frequency range (up to 1611 cm −1 ).
ISSN:1062-8738
1934-9432
DOI:10.3103/S106287380907003X