Raman study of W-doped diamond-like carbon films
Amorphous diamond-like carbon (DLC) films prepared by the plasma chemical method on glass substrates SiO 2 -Al 2 O 3 -TiO 2 have been studied by Raman spectroscopy. W-doped DLC films show a considerable increase in the G -band frequency up to 1592 cm −1 and an enhanced surface hardness. The DLC film...
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Veröffentlicht in: | Bulletin of the Russian Academy of Sciences. Physics 2009-07, Vol.73 (7), p.874-877 |
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Hauptverfasser: | , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Amorphous diamond-like carbon (DLC) films prepared by the plasma chemical method on glass substrates SiO
2
-Al
2
O
3
-TiO
2
have been studied by Raman spectroscopy. W-doped DLC films show a considerable increase in the
G
-band frequency up to 1592 cm
−1
and an enhanced surface hardness. The DLC films doped with W and atoms of semiconductors exhibit high transparency and a higher
G
-band shift to the high-frequency range (up to 1611 cm
−1
). |
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ISSN: | 1062-8738 1934-9432 |
DOI: | 10.3103/S106287380907003X |