Structural and phase transformations in thin molybdenum films under stationary irradiation in nitrogen-hydrogen plasma

Structural and phase transformations in thin molybdenum films caused by irradiation in nitrogen-hydrogen arc-discharge plasma are investigated using transition electron microscopy and electron diffractometry. The processing parameters for obtaining thin molybdenum nitride Mo 2 N films are determined...

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Veröffentlicht in:	Bulletin of the Russian Academy of Sciences. Physics 2009-04, Vol.73 (4), p.482-484
Hauptverfasser:	Chaplanov, A. M., Shcherbakova, E. N.
Format:	Artikel
Sprache:	eng
Schlagworte:	Diffraction Electric arcs Electron microscopy Hadrons Heavy Ions Hydrogen plasma Hydrogen storage Irradiation Molybdenum Nuclear Physics Phase transitions Physics Physics and Astronomy Proceedings of the XXII Russian Conference on Electron Microscopy EM-2008 Process parameters Thin films
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Beschreibung
Zusammenfassung:	Structural and phase transformations in thin molybdenum films caused by irradiation in nitrogen-hydrogen arc-discharge plasma are investigated using transition electron microscopy and electron diffractometry. The processing parameters for obtaining thin molybdenum nitride Mo 2 N films are determined.
ISSN:	1062-8738 1934-9432
DOI:	10.3103/S1062873809040108