A SHF-SEM method of induced current

A SHF-SEM method of induced current

We consider features of studying semiconductor structures by SEM with an attachment for registering microwave signal variations when a sample in an SHF field is irradiated by pulsing electronic probe.

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Veröffentlicht in:Bulletin of the Russian Academy of Sciences. Physics 2011-09, Vol.75 (9), p.1240-1242
Hauptverfasser: Buzynin, A. N., Luk’yanov, A. E., Luk’yanov, F. A., Rau, E. I.
Format: Artikel
Sprache:eng
Schlagworte:
Hadrons
Heavy Ions
Nuclear Physics
Physics
Physics and Astronomy
Proceedings of the XXIII Russian Conference on Electron Microscopy
Superhigh frequencies
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Zusammenfassung:We consider features of studying semiconductor structures by SEM with an attachment for registering microwave signal variations when a sample in an SHF field is irradiated by pulsing electronic probe.
ISSN:1062-8738
1934-9432
DOI:10.3103/S1062873811090073