Prospects for using cathodoluminescence in SEM to study the distribution and types of breakdown in glass insulators

Prospects for using cathodoluminescence in SEM to study the distribution and types of breakdown in glass insulators

A method for detecting dielectric breakdown in the signal of cathodoluminescence in SEM is compared with both capacitive and secondary-emission methods. In the investigated samples of glass dielectrics, breakdowns of two types are found: surface and emission. The prospects for using cathodoluminesce...

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Veröffentlicht in:Bulletin of the Russian Academy of Sciences. Physics 2012-09, Vol.76 (9), p.978-982
Hauptverfasser: Kuz’menkov, A. V., Ivannikov, P. V., Gabel’chenko, A. I.
Format: Artikel
Sprache:eng
Schlagworte:
Cathodoluminescence
Defects
Dielectric breakdown
Emission analysis
Glass
Hadrons
Heavy Ions
Insulators
Nuclear Physics
Physics
Physics and Astronomy
Proceedings of the XVII Russian Symposium on Scanning Electron Microscopy and Analytical Methods of Investigation Applied for Solid States Physics
Repair & maintenance
Sampling methods
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Zusammenfassung:A method for detecting dielectric breakdown in the signal of cathodoluminescence in SEM is compared with both capacitive and secondary-emission methods. In the investigated samples of glass dielectrics, breakdowns of two types are found: surface and emission. The prospects for using cathodoluminescence to detect and localize defects in insulators that lower the breakdown voltage are discussed.
ISSN:1062-8738
1934-9432
DOI:10.3103/S1062873812090110